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A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition
A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition
2007
Xiuqiong Lai
Junfang Chen
Silie Fu
sumomo
zhangmaoping
Lei Shi
yangchunlin
Keywords:
Metalorganic vapour phase epitaxy
Thin film
Chemical vapor deposition
Combustion chemical vapor deposition
Carbon film
Diamond-like carbon
Plasma processing
Inorganic chemistry
Ion source
Materials science
Chemical engineering
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