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Processing and characterisation of solgel deposited Ta 2O 5 and TiO 2Ta 2O 5 dielectric thin films
Processing and characterisation of solgel deposited Ta 2O 5 and TiO 2Ta 2O 5 dielectric thin films
1999
A. Cappellani
Joseph L. Keddie
N.P. Barradas
S M Jackson
Keywords:
Dielectric
Rutherford backscattering spectrometry
Chemistry
Analytical chemistry
Thin film
Sol-gel
Titanium
Correction
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