Parametric reduced order models in static multiphysics analysis of MEMS switches

This contribution proposes a method to extract parametric reduced models that describe the coupled structural-electric behavior of RF MEMS switches. The equivalent capacitance coefficients and the effective elastic coefficients are extracted from coupled structural-electrostatic analysis. Parametric models are built based on the sensitivities of the extracted equivalent coefficients. The method is validated on two benchmarks: one for which experimental values are available, and the other one from the literature. The results show that, for the tested configurations, even a model of order 1 or 2 can catch accurately enough (e.g. relative error of less than 5 %) the pull-in voltage of the full order model, for a variation of the investigated parameter of less than 20 %. Such a reduced parametric model is useful in early stages of the design.