Implantation of 5_keV Deuterium in BeO

Abstract The trapping of 5 keV deuterium in ∼ 165 and ∼ 4000 nm thick BeO films grown by thermal oxidation on Be substrates was investigated at different temperatures using the D(3He,H)4He nuclear reaction. The ratio of implanted D to BeO molecules obtained at saturation is 0.24 to 0.34. The D migrates from its end of range location and distributes itself uniformly in the BeO film. With increasing implant temperature the BeO layer flakes from the Be substrate. The distribution of D in BeO films at high concentrations is not consistent with diffusivity measurements at low concentrations of T in BeO.