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Relationship between residual species and microstructure in the chemical-vapor deposited oxide films
Relationship between residual species and microstructure in the chemical-vapor deposited oxide films
2004
Shinnosuke Kawaguchi
Kouichi Takayama
Shigeo Ohshio
Hidetoshi Saitoh
Keywords:
Oxide
Chemical engineering
Aluminum oxide
Thermal desorption spectroscopy
Microstructure
Chemical vapor deposition
Residual
Magnesium
Inorganic chemistry
Materials science
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