A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

Abstract For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values.