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Analysis of the Pre-epi Bake Conditions on the Defect Creation in Recessed SiGe S/D Junctions
Analysis of the Pre-epi Bake Conditions on the Defect Creation in Recessed SiGe S/D Junctions
2007
Mireia Bargallo Gonzalez
Nicole K. Thomas
Eddy Simoen
Peter Verheyen
Andriy Hikavyy
Frederik Leys
Yasutoshi Okuno
Bertrand Vissouvanadin Soubaretty
Benny Van Daele
Luc Geenen
Roger Loo
C. Claeys
Vladimir Machkaoutsan
Pierre Tomasini
Shawn G. Thomas
Jiong-Ping Lu
Johan Weijtmans
R. Wise
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Materials science
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