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Homogeneous and Heterogeneous Reaction Mechanisms in CH$_{3}$F-O$_{2}$ Inductively Coupled Plasmas
Homogeneous and Heterogeneous Reaction Mechanisms in CH$_{3}$F-O$_{2}$ Inductively Coupled Plasmas
2013
Vincent M. Donnelly
Erdinc Karakas
Sanbir Kaler
Qiaowei Lou
Demetre J. Economou
Keywords:
Homogeneous
Plasma
Reaction mechanism
Inorganic chemistry
Chemistry
Materials science
Physical chemistry
Correction
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