Mist-CVD Growth of High Quality ZnO Thin Films at Low Temperature for Inverted Organic Solar Cells

We report the deposition of ZnO thin films on indium-doped tin oxide (ITO)-coated glass substrates via Mist chemical vapor deposition (Mist-CVD) at a temperature range of 250, 300 and 350 °C, respectively. Surface morphology and crystalline quality were investigated by field emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD), respectively and optical property by transmission spectra. Further, we have optimized the surface morphology of ZnO films for inverted organic solar cells (IOSCs) by fabricating IOSCs on glass substrate, consisting of Au/MoO 3 /PCBM:P3HT/ZnO/ITO. It was found that the photovoltaic power conversion efficiency (PCE) of IOSCs is affected by the transmittance and crystallinity of ZnO thin films.