Ultra-Precision Positioning Using Linear Motion Ball Bearings and Linear Motor: —Frictional Behavior in Displacement Ranges from Sub-millimeters to Nanometers—@@@—サブミリ~ナノメートル変位領域の摩擦挙動—
2016
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
12
References
0
Citations
NaN
KQI