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Acemap > Paper > 25pB16p 磁場中混合プラズマからの基板入射イオンに及ぼす電極近傍回転電場の効果(ヘリカル/プラズマ応用)

25pB16p 磁場中混合プラズマからの基板入射イオンに及ぼす電極近傍回転電場の効果(ヘリカル/プラズマ応用)

1999 
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