Old Web
English
Sign In
Acemap
>
Paper
>
Etching process of hydrogen-terminated Si(110) vicinal surfaces revealed by Kuramoto-Sivashinsky equation
Etching process of hydrogen-terminated Si(110) vicinal surfaces revealed by Kuramoto-Sivashinsky equation
2017
Layli Amaliya
Erina Kawamoto
Tomoyuki Yoneyama
Toshihiro Kawakatsu
Toyoaki Eguchi
S. Suto
Keywords:
Computational chemistry
Kuramoto–Sivashinsky equation
Hydrogen
Vicinal
Chemistry
Etching
Chemical physics
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]