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Robotic workstation for the assembly of heterogeneous MEMS devices.
Robotic workstation for the assembly of heterogeneous MEMS devices.
2005
James M. Bailar
Brian A. Kast
James F. Jones
Keywords:
Miniaturization
Workstation
Robot
Computer engineering
Manufacturing engineering
Microelectromechanical systems
Engineering
Microelectronics
Embedded system
Fabrication
Correction
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