Study on Super-Smooth Polishing Methods. (2nd Report). Surface Characteristics of the Polyurethane Polisher in Mirror-Polishing Process.

1999 
This paper deals with the basic research on super-smooth polishing method and surface irregularities of polisher affecting polishing characteristics. Firstly, a polishing model was proposed taking account of the contacting conditions between work and polisher, the measuring conditions of the surface irregularities on polyurethane polisher were examined by using a stylus type 3-dimensional surface roughness measuring instrument. Then, the correlation between polishing results for glass works and the polisher irregularities was discussed. (1) In measuring the surface irregularities of polishers, it was found that 500μm in radius at form stylus tip was suitable. (2) The polisher irregularities showed maximum just after dressing, and decreased little by little as polishing advanced. The values were not recovered remarkably by washing with using a plastic brush. (3) Although the values of irregularities at porous polishers were independent of the dressing pressure, a rather hard polisher having the foam structure showed a noteworthy result that the smaller values in polisher irregularities were given when the higher pressure applied. (4) The specific stock removal amount, when using the porous polishers, showed a tendency to be small after just dressing, to increase as polishing advancing, and to decrease after brush washing. While, when using the hard polisher gave a completely reverse result. (5) In the case of polishing surface composed of various materials, the step height difference between the material were arranged as follows: (after enough polishing) < (after brush washing) < (after just dressing). Such tendency has good agreement with an order of polisher surface irregularities.
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