Fabrication of a miniaturized cell using microsystem technologies for electrochemical applications

Abstract A new type of electrochemical cell has been developed for use in electrochemical, chemical and biological applications. Using a platinum microelectrode as working electrode, this cell incorporates a silver microelectrode as reference electrode. These microelectrodes, whose area is equal to 1 μm 2 , were fabricated using photolithography, sputtering, and focused ion beam (FIB) technologies since these micro-fabrication techniques allow us to develop miniaturized electrochemical cells useful either for nanoelectrochemistry or biosensors applications. In this study, we show it is possible to coat a surface by chemical or biological compounds by immersing the microelectrodes in a solution, then setting a difference of potential between the two microelectrodes of the cell. For example, we used this miniaturized cell to realize the electrochemical polymerization of aniline into polyaniline to show that this electrochemical cell is efficient to coat a surface with a thin film of polymer.