Cleanroom Utilities Overview: University of Louisville
2008
Details about four major utilities that support the University of Louisville's new Micro/NanoTechnology Cleanroom are presented. This includes a 3000 gal. deionized water system capable of delivering 18.1 Mohm-cm water at a rate of 75 gal./min., a 6,000 gal. liquid nitrogen system for delivering high purity nitrogen gas, an acid waste neutralizing system for automatically adjusting pH of cleanroom effluent, and a toxic gas monitoring system capable of monitoring over 60 satellite gas sensors.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI