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Transfer of Ferroelectric Thin Film Capacitor Using Internal Stress of Plated Film
Transfer of Ferroelectric Thin Film Capacitor Using Internal Stress of Plated Film
2021
Sueshige Kazutaka
Masahisa Fujino
Tadatomo Suga
Masaaki Ichiki
Keywords:
ferroelectric thin films
Capacitor
Materials science
internal stress
Composite material
Correction
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