Computer Analysis of the Eaton ICB Source
1990
A computer simulation that includes the space charge of electrons and ions has been done for the Eaton ionized cluster beam source in order to better understand how the potential fields affect film deposition. It is found that the space charge effects dominate the dynamics of the ionized clusters, painting a picture that differs radically from what the Laplace fields predict.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
1
References
0
Citations
NaN
KQI