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The Optical and Mechanical Properties of Toluene-TEOS Hybrid Plasma-Polymer Thin Films Deposited by PECVD
The Optical and Mechanical Properties of Toluene-TEOS Hybrid Plasma-Polymer Thin Films Deposited by PECVD
2009
Sang-Jin Cho
I.-S. Bae
Jin-Hyo Boo
Sungwoo Lee
Donggeun Jung
Keywords:
Physics
Toluene
Polymer
Thin film
Dielectric
Plasma
Nuclear magnetic resonance
Plasma-enhanced chemical vapor deposition
Inorganic chemistry
polymer thin films
Condensed matter physics
Chemical engineering
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