Reel-to-Reel Fabrication ofIntegrated Circuits Basedon Soluble Polymer Semiconductor

Rapid progress inthefield oforganic semiconductors makesthevision ofplastic integrated circuits reachable. Polymer electronic isexpected tobea promising technology forlow-cost andlarge-area electronic systems, whichcannotbeaddressed bytraditional chip technology. Solutions ofpolymer orpolymer based pastes offer advantages duetotheir easy processing possibilities which give theopportunity tocoat andpattem themlike a printing ink.Costrequirements ofpolymer electronic implythatformanufacturing alsoverycost-effective processes mustbeused. Hencereel-to-reel manufacturing withendless substrates offoil isakeytechnology to fulfill thechallenging costdemands ofcheapflexible systems. Withinthisworka process formanufacturing integrated circuits based onsolution processed polymer semiconductors hasbeendeveloped. Basis isareel-toreelworking photolithographic patterning process for metallized foils, whichisusedtofabricate thebasic source-drain layerwithhighresolution. By two subsequent lacquering andthree screen printing steps polymer field effect transistors areintegrated tocircuits.