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Moisture Permeation through Ultrathin TiO$_{2}$ Films Grown by Atomic Layer Deposition
Moisture Permeation through Ultrathin TiO$_{2}$ Films Grown by Atomic Layer Deposition
2012
Seung-Woo Seo
Eun Jung
Chankyu Lim
Heeyeop Chae
Sung Min Cho
Keywords:
Chemistry
Analytical chemistry
Atomic layer deposition
Moisture
Permeation
Correction
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