USE OF ATTENUATION AND PHASE DELAY CHARACTERISTICS OF SAW TO MEASURE AIR-GAP HEIGHT

The attenuation and phase delay characteristics Theoretical plots of the fractional decrease in of a SAW which has been perturbed by a metallic plane group velocity ve-rsus gap height are plotted in Figs. above the surface of a piezoelectric delay line have 1 and 2 for a. yz-LiNb07 delay line centered at 230 MHz, been theoretically computed and experimentally measured, These measurements provide a diagnostic tool for determining the height of an air gap and for determining the minimum achievable air gap for a particular supporting structure. IDT