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Application and Improvement of the Spreading Resistance Method for p-Type 6H-SiC
Application and Improvement of the Spreading Resistance Method for p-Type 6H-SiC
2000
T. Gebel
D. Panknin
Robert Riehn
S Parascandola
W. Skorupa
Keywords:
Composite material
Metallurgy
Surface states
Materials science
Spreading resistance profiling
ion sputtering
contact barrier
Correction
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