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Metal-Coated Lightly-Doped Drain (MLD) MOSFET's for Sub-Micron VLSI's
Metal-Coated Lightly-Doped Drain (MLD) MOSFET's for Sub-Micron VLSI's
1985
Yuki Tsunashima
Takeo Wada
K. Yamada
T. Moriya
K. Taniguchi
Motofumi Kashiwagi
Hiroyuki Tango
Masahiro Nakamura
R. Dang
Keywords:
Medicine
Environmental health
Micrometre
Doping
MOSFET
Very-large-scale integration
Electronic engineering
Metal
Correction
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