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SOI material technology using plasma immersion ion implantation
SOI material technology using plasma immersion ion implantation
1996
Xiang Lu
S. Sundar Kumar Iyer
Jing Min
Zhongyun Fan
Jianbei Liu
Paul K. Chu
C herrie Z hu
N.W. Chueng
Keywords:
Theoretical computer science
Electronic engineering
Integrated circuit
Silicon on insulator
Plasma-immersion ion implantation
Computer science
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