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Selective epitaxial growth using disilane and hydrogen/oxygen gas in low-pressure chemical-vapor deposition
Selective epitaxial growth using disilane and hydrogen/oxygen gas in low-pressure chemical-vapor deposition
2002
Yong Hoon Son
Sung-Gye Park
Seung-Eui Nam
Hyoung June Kim
S. H. Kim
Keywords:
Chemical vapor deposition
Oxygen
Physics
Nuclear magnetic resonance
Epitaxy
Hydrogen
Disilane
Inorganic chemistry
Chemical engineering
oxygen gas
Condensed matter physics
Correction
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