Progress in Crystallization Behaviors of Barium Strontium Titanate Thin Films Prepared by a Sol-gel Process

The influences of the precursors, the substrate and the heat-treatment process on dielectric properties and crystallization behaviors of barium strontium titanate (Ba1- SrxTiO3(x=0~1, BST)ferroelectric thin films by a sol-gel method x were discussed emphatically and systematically, and interpretations were thermodynamically and kinetically given. In order to prepare BST thin films with excellent dielectric properties successfully under a relatively low treatment temperature by eliminating or weakening the effects of the intermediate phase, some practical solutions were brought forward: low-temperature decomposing carboxylate and chelated titanate as starting materials, substrate with little lattice mismatch, RTA, seeding, suitable additive and so on. Finally, the problems that must further be resolved in near future are also singled out.