Dilute Waveguide Reflective Semiconductor Optical Amplifier for 3D Hybrid Silicon Photonics Integration

A dilute waveguide reflective semiconductor optical amplifier for alignment tolerant hybrid silicon photonics integration was demonstrated with emitting wavelength of $1.55\ \mu \mathrm{m}$ . Far field divergence angle at fast diverge axis was 11.8° compares to conventional waveguide of 28.2°. The dilute waveguide demonstrated 45% alignment tolerance improvement with mode size of $84\ \mu \mathrm{m}^{2}$ .