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Analyses and Design of Magnetic Field in a Magnetron Sputtering System
Analyses and Design of Magnetic Field in a Magnetron Sputtering System
1998
Shunji Ido
Masanori Kawashima
M. Kashiwagi
Keywords:
Sputter deposition
Magnetic field
Finite element method
Mesh generation
Electronic engineering
Materials science
High-power impulse magnetron sputtering
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