A Monte Carlo Simulation of Langmuir Probe Methods for Plasmas Having RF Amplitude Oscillations

A Monte Carlo simulation model to analyze Langmuir probe characteristics is developed for an ideal plane probe in plasmas having rf oscillations of space potential only. When the oscillation amplitude is larger than electron temperature, plasma parameters determined with this model agree with those predicted by the simple probe theory with space potential oscillations. Space potential shifts and deformed probe characteristics for an rf discharge are explained by profiles of space/time electron density, energy and potential gained from these probe simulations with rf space potential oscillations.