FABRICATION OF TRANSPARENT CARBON NANOTUBE FILM PIEZO- RESISTORS

We present the fabrication process of transparent carbon nanotube film (CNF) piezoresistors embedded in polymer membranes. CNFs fabricated by vacuum filtration were patterned on Au-deposited silicon wafer and patterned CNFs were fully transferred into the poly-dimethysiloxane (PDMS) membranes based on the poor adhesion between silicon wafer and Au layer. When the input pressure is applied, the PDMS membrane is deformed, so the resistance of CNFs increases. The gauge factor of CNF with transmittance of 65 ~ 95 % is obtained around 10–20. In polymer MEMS, CNF piezoresistors are the promising materials which were not required the high temperature process.