Silicon-based miniature side nozzle synthetic jet device and method for manufacturing same

The invention discloses a silicon-based miniature side nozzle synthetic jet device and a method for manufacturing the same. A known silicon-based miniature side nozzle synthetic jet device adopts wet etching technology, the vertical section of a nozzle is in the geometric shape of two cones with opposite closed angles, machining difficulty is high, and jet energy is low. By means of inductively coupled plasma etching, the nozzle is machined on the side wall of a cavity and communicated with the cavity, and the cavity, a suspended diaphragm and the nozzle can be simultaneously machined. The horizontal section contour of the nozzle is rectangular, in a single cone shape or arc-shaped, a small end of the single cone is positioned on the outer wall of the nozzle, and the central line of the nozzle is perpendicular to the side wall of the cavity, or a 45-degree angle is formed between the central line of the nozzle and the side wall of the cavity. Alternatively, the horizontal sections of both of two nozzles are rectangular, and the two nozzles extend out along the front wall and the rear wall of the cavity respectively. As the cavity, the suspended diaphragm and the nozzle are simultaneously machined, yield is improved, the mounting area of a device array is decreased by means of laterally placing the nozzle, and the actuating performance of the jet device can be improved by means of machining the horizontal section contour of the nozzle into the shape.