Synthesis of medium entropy Mn1.56Co0.96Ni0.48O4 films by solid-state reaction

Abstract Five metal layers (Mn/Co/Mn/Ni/Mn) were deposited on Si substrate by electron beam evaporation and then annealed in air to form a Mn1.56Co0.96Ni0.48O4 spinel oxide film. The increase in annealing temperature led to a gradual growth in the grain size. While sample annealed at 650 °C exhibits a poor surface morphology and lowest electrical resistivity, the sample at 750 °C is with the largest values of thermal constant B (4196 K) and activation energy Ea (0.361 eV). In sum, the proposed synthesis route of medium entropy Mn-based thermosensitive films was feasible and may be meaningful for preparation of other medium/high entropy materials.