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Influence of native oxide layer on electrical characteristics of Al2O3/n-GaN capacitors
Influence of native oxide layer on electrical characteristics of Al2O3/n-GaN capacitors
2018
Yuge Kazuya
Nabatame Toshihide
Yoshikawa Yoshihiro
Ohi Akihiko
Ikeda Naoki
Sang Liwen
Koide Yasuo
Ohishi Tomoji
Keywords:
Oxide
Capacitor
Atomic layer deposition
Dipole
Inorganic chemistry
Materials science
Optoelectronics
fixed charge
Correction
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