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Elemental Reactions of Nb 2 O 5 RT-ALD Explained by Quartz Crystal Microbalance Measurements
Elemental Reactions of Nb 2 O 5 RT-ALD Explained by Quartz Crystal Microbalance Measurements
2021
Kazuki Yoshida
Kentaro Saito
Masanori Miura
Kensaku Kanomata
Fumihiko Hirose
Keywords:
Quartz crystal microbalance
Niobium oxide
Analytical chemistry
Materials science
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