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Si(110)基板上SiGe膜の歪み緩和におけるイオン注入の効果
Si(110)基板上SiGe膜の歪み緩和におけるイオン注入の効果
2016
加藤まどか
murakami taiyou
arimoto keisuke
santyuu junzi
nakagawa kiyokazu
sawano kentarou
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