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Structure Control and Etching Stabilities of Carbon Nanowalls Grown by Low Magnetic-Field Helicon Plasma CVD
Structure Control and Etching Stabilities of Carbon Nanowalls Grown by Low Magnetic-Field Helicon Plasma CVD
2010
Masahiro Yamazaki
Toshiaki Kato
Ryo Ueda
T. Kaneko
Rikizo Hatakeyama
Chiharu Takahashi
Keywords:
Analytical chemistry
Carbon
Plasma
Magnetic field
Helicon
Materials science
low magnetic field
Etching
structure control
carbon nanowalls
Optoelectronics
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