Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.