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The effect of Y2O3 buffer layer for La2O3 gate dielectric film
The effect of Y2O3 buffer layer for La2O3 gate dielectric film
2005
Kouichi Nakagawa
Kunihiro Miyauchi
Kuniyuki Kakushima
Tsukaho Hattori
Kazuyoshi Tsutsui
Hiroshi Iwai
Keywords:
Cathode ray
Gate oxide
Analytical chemistry
Gate dielectric
Electronic engineering
Materials science
Leakage (electronics)
X-ray photoelectron spectroscopy
Equivalent oxide thickness
Correction
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