An imaging optical system for imaging an object field in an image field as well as illumination optics for illuminating an object field

An imaging optical system having a plurality of mirrors, which images an object field (9) in an object plane (11) into an image field (13) in an image plane (14). A reflection surface of at least one of the mirrors is configured as a non-recordable by a rotationally symmetrical function freeform surface. The object field (9) has the shape of an arc field. The tympanum is defined by two half circles, the radius of which is smaller than 300 mm. In another aspect of the object field has an aspect ratio (x / y), which is greater than 1, wherein a ratio of a minimum and a maximum transverse dimension of the object field is smaller than 0.9. In another aspect of the object field (9) and / or the image field (13) deviate from a mirror-symmetrical field configuration. An illumination optics (10) for illuminating the object field (9) has illumination light (3) carrying components that are designed for illuminating a correspondingly shaped object field (9). This results in an imaging optics, illumination optics and an equipped hereby projection exposure system, with higher demands is carried on the correction of aberrations on the imaged with the imaging optics field calculation.