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Compact, Dither Controlled Integrated Electromechanical Force Actuator for Active Optics Control
Compact, Dither Controlled Integrated Electromechanical Force Actuator for Active Optics Control
1994
A. Nardinocchi
G.P. Sanguinetti
M. Venturini
Keywords:
Actuator
Active optics
Dither
Control theory
Physics
Correction
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