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Zn3P2 Thin Film Solar Cell Grown by Plasma Assisted Vapor Phase Deposition
Zn3P2 Thin Film Solar Cell Grown by Plasma Assisted Vapor Phase Deposition
1988
Yoshimine Kato
Toshiro Watanabe
Shoichi Kurita
Toshikazu Suda
Keywords:
Control engineering
Ion plating
Thin film
Hybrid physical-chemical vapor deposition
Engineering
Combustion chemical vapor deposition
Plasma processing
Electron beam physical vapor deposition
Carbon film
Analytical chemistry
Pulsed laser deposition
Control theory
Chemical engineering
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