Tuning of gold nanoparticles on planar and ion-sputtered rippled Si surface above Au-Si eutectic temperature

Au nanoparticles have been synthesized on 36 nm periodic rippled Si surface, generated by irradiation of low energy Ar+ ion beam sputtering (IBS) at oblique incidence. On subsequent annealing after deposition above Au-Si eutectic temperature, the ripple alignment is lost and prominent nano-dot of diameter comparable to the ripple wavelength evolves on the surface revealed by Atomic Force Microscopy (AFM) measurement. Further Grazing Incidence X-ray Diffraction (GIXRD) investigation before and after annealing confirm the existence of gold silicide for the rippled Si surface, whereas no trace of silicide formation is observed for Au deposition on planar Si surface.