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A Study on the Effect of Oxygen Flow Rate on Optical Properties of RF Sputtered a-GaOx Thin Films on Corning Glass Substrate
A Study on the Effect of Oxygen Flow Rate on Optical Properties of RF Sputtered a-GaOx Thin Films on Corning Glass Substrate
2021
Keerthana C S
Anjana S. Nair
Jisha Elsa Abraham
Santhosh Kumar A
N.V. Unnikrishnan
Saritha A C
Keywords:
Chemical engineering
Substrate (chemistry)
Thin film
Materials science
oxygen flow rate
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