THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE

In this study, inductive radio-frequency (RF) argon (Ar) discharge and afterglow downstream discharge at low pressure were investigated with optical emission spectroscopy (OES). Spectral lines recorded with OES measurements were detected in the wavelength range of 650-900 nm. For all measurements, a spectrum line that remained at approximately the same value was taken as the value of the reference wavelength throughout the study. The changes in the optical emission spectrum ratios of the inductive RF Ar discharge and the afterglow downstream discharge with respect to time were compared. As a result, it was reported that some transitions for both regions were to be increased in time. The transitions in time for some wavelengths (738.39, 751.47, 772.42, 801.48, 810.37 and 842.46 nm) have been approximately improved between 20% and 34% for discharge zone. Also, it can be increased for wavelength of 801.48 nm in afterglow downstream discharge region (32.55%).