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Critical BEOL Aspects of the Fabrication of a Thermally-Assisted MRAM Device
Critical BEOL Aspects of the Fabrication of a Thermally-Assisted MRAM Device
2015
Eugene J. O'Sullivan
Daniel C. Edelstein
Nathan Marchack
Michael F. Lofaro
Michael C. Gaidis
Eric A. Joseph
Anthony J. Annunziata
Dirk Pfeiffer
P. L. Trouilloud
Yu Zhu
Steve Holmes
Armand Galan
Adam M. Pyzna
Jemima Gonsalves
Keywords:
Philosophy
Fabrication
Electronic engineering
Cognitive science
Magnetoresistive random-access memory
Engineering physics
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