46.2: Invited Paper: Micron-Patterned Deposition through Shadow masks with high precision alignment for OLED and e-Paper applications

Conventional shadow-mask alignment using mechanical pins or machine-vision techniques achieve 5 micron alignment accuracy. Here we introduce a novel alignment system-architecture based on coded apertures along with discrete photo detectors as the sensing elements. It allows submicron accuracy and repeatability making it highly suitable for display manufacturing applications.