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Rapid trench-filling growth of Ge epitaxial layer on Si
Rapid trench-filling growth of Ge epitaxial layer on Si
2021
Kazuki Motomura
Kota Kato
A Piedra-Lorenzana Jose
Bin Amin Mohd Faiz
Takeshi Hizawa
Tetsuya Nakai
Yasuhiko Ishikawa
Keywords:
Epitaxy
Materials science
layer
Trench
Optoelectronics
Correction
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