A method for producing dielectric layers mixing and capacitive element and use thereof

The present invention provides a method of producing a capacitive element (100), wherein a substrate (101) is provided as a first electrode layer of the capacitive element (100) provided as an electrode layer substrate (101) is conditioned, a dielectric layer (102 ) is deposited on the conditioned substrate (101) and a second electrode layer (104) is applied to the generated layer stack, said layer stack is modified by annealing such that (on the conditioned substrate 101) deposited dielectric layer (102) having a on the dielectric layer (102) deposited reaction layer (103) forms a dielectric mixed layer (105) having an increased dielectric constant (k) and increased thermal stability.