MICRO COIL FABRICATION FOR UBIQUITOUS POWER MONITORING

This paper presents our recent progress on the microfabrication technology of micro coil for ubiquitous power monitoring. Electromagnetic simulations and experiments demonstrated that micro solenoid-type inductor is attractive for the current sensing and thus power-consumption monitoring application. A three-dimensional photolithography technology and equipment are successfully developed for the low-cost fabrication of micro solenoid coil structure. A so-called cylinder projection lithography is also introduced in this work.